Pellicles and methods of manufacturing the same

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United States of America Patent

PATENT NO 9690190
APP PUB NO 20160201201A1
SERIAL NO

14969645

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Abstract

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A method of manufacturing a pellicle includes forming a membrane on a first surface of a substrate from a chemical reaction in which the substrate serves as a catalyst, forming a protective pattern on a second surface of the substrate, immersing the substrate in an etchant solution, such that a portion of the substrate exposed through the protective pattern is removed to form a frame, and replacing the etchant solution with a solvent.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDSUWON-SI GYEONGGI-DO 16677
SUNGKYUNKWAN UNIVERSITY'S RESEARCH & BUSINESS FOUNDATION2066 SEOBU-RO JANGAN-GU SUWON-SI GYEONGGI-DO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Jae-Hyuck Seoul, KR 18 72
Kim, Byung-Gook Seoul, KR 36 182
Kim, Mun-Ja Suwon-si, KR 5 28
Kim, Soo-Young Suwon-si, KR 69 907
Kim, Tae-Sung Suwon-si, KR 134 1406
Shin, Dong-Wook Changwon-si, KR 15 32
Yoo, Ji-Beom Seoul, KR 16 164

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