Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates

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United States of America Patent

PATENT NO 9694990
SERIAL NO

13916910

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Abstract

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A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetizable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).

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Patent Owner(s)

Patent OwnerAddress
EVATEC AGHAUPTSTRASSE 1A TRÜBBACH 9477

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gaechter, Bruno Ruethi, CH 4 8
Matteacci, Pierre Pfafers, CH 3 5
Voser, Stephan Sevelen, CH 16 89

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