Testing apparatus and method for microcircuit and wafer level IC testing
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United States of America Patent
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Jul 4, 2017
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N/A
app pub date -
Jul 10, 2014
filing date -
Jul 11, 2013
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Abstract
The test system provides an array of test probes having a cross beam. The probes pass through a first or upper probe guide retainer which has a plurality of slot sized to receive the probes in a way that they cannot rotate. The probes are biased upwardly through the retainer by an elastomeric block having a similar array of slots. The elastomer is then capped at its bottom by a second or lower retainer with like slots to form a sandwich with the elastomer therebetween. The bottom ends of the probes are group by probe height. A plurality of flex circuits at the different heights engage bottom probe ends at their respective height levels and take continue the circuits to a probe card where test signals originate.
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