Inspection apparatus, and abnormality detection method
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United States of America Patent
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Jul 11, 2017
Grant Date -
Sep 24, 2015
app pub date -
Mar 4, 2015
filing date -
Mar 19, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
In general, according to one embodiment, an inspection apparatus includes a disposition; a vibration detector configured to output a signal corresponding to vibration of the inspection object; a determination module configured to determine presence/absence of abnormality of the inspection object and configured to Fourier-transform an output result of the vibration detector at a time when the inspection object is disposed on the disposition section, to create vibration information indicative of vibration power of a characteristic frequency of each of structural elements of the disposition section, and to determine presence/absence of abnormality of the inspection apparatus, based on the vibration information; and a transmission module configured to transmit an output signal of the vibration detector to the determination module.
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