Closed loop control techniques for displacement sensors with optical readout

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United States of America Patent

PATENT NO 9702992
SERIAL NO

14434006

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Abstract

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In one aspect, an apparatus is disclosed comprising: a housing; a proof mass movable within the housing; an optical element mounted on one of the housing and the proof mass; a reflective element on the other one of the housing and the proof mass; a light source configured to illuminate grating and minor; and one or more detectors configured to detect light incident from the reflective element and the diffractive element and generate a signal indicative of the relative displacement of proof mass and the housing.

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Patent Owner(s)

  • SILICON AUDIO SEISMIC, LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Avenson, Bradley Dean Pflugerville, US 1 36
Christensen, Matthew Raymon Austin, US 1 36
Garcia, Caesar Theodore Austin, US 1 36
Hall, Neal Allen Austin, US 9 410
Onaran, Abiden Guclu Austin, US 1 5
Onaran, Abidin Guclu Austin, US 13 225
Schlicher, James Coe Los Ranchos, US 2 44
Zaatari, Ahmad Austin, US 1 36

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