Anode unit and plating apparatus having such anode unit

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United States of America Patent

PATENT NO 9708724
SERIAL NO

14629453

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Abstract

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An anode unit capable of forming a metal film having a uniform thickness on a substrate is disclosed. The anode unit includes an anode, a first feeding portion connected to a central portion of the anode, a second feeding portion located on a central axis of the anode and located away from the anode, and arms extending radially from the second feeding portion. The arms are connected to a periphery of the anode.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 1448510

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakada, Tsutomu Tokyo, JP 62 1468
Owatari, Akira Sacramento, US 25 216
Tamari, Yusuke Sacramento, US 11 60
Tsujino, Junichiro Tokyo, JP 7 31
Yahagi, Mitsutoshi Tokyo, JP 25 131

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