Control-electrode shielding for improved linearity of a MEMS DVC device

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United States of America Patent

PATENT NO 9711289
SERIAL NO

14779564

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Abstract

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The present invention generally relates to a MEMS DVC having a shielding electrode structure between the RF electrode and one or more other electrodes that cause a plate to move. The shielding electrode structure may be grounded and, in essence, block or shield the RF electrode from the one or more electrodes that cause the plate to move. By shielding the RF electrode, coupling of the RF electrode to the one or more electrodes that cause the plate to move is reduced and capacitance modulation is reduced or even eliminated.

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Patent Owner(s)

Patent OwnerAddress
CAVENDISH KINETICS INC2960 NORTH 1ST STREET SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alhalabi, Ramadan A San Jose, US 3 14
Van, Kampen Robertus Petrus S-Hertogenbosch, NL 43 282

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