Substrate holder and a device and a method for treating substrates

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9711388
SERIAL NO

14441524

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate holder having a plate element for receiving a substrate includes at least one recess in a first side and spacers in the at least one recess. At least one opening is fluidly connected to the recess and is connectable to an external gas delivery/exhaust unit. At least one notch or channel radially surrounds the recess. At least one opening is fluidly connected to the notch or channel and is connectable to an external gas delivery/exhaust unit. A circumferential web radially surrounds the recess and is located between the recess and the notch or channel. A first circumferential contact surface is formed on the upper side of the web and radially surrounds the recess, such that a substrate abutting against the first contact surface forms an enclosed chamber with the recess. A second circumferential contact surface radially surrounds the notch or channel.

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Patent Owner(s)

  • CENTROTHERM PHOTOVOLTAICS AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kegel, Wilhelm Laichingen, DE 9 187
Kummer, Günther Ulm, DE 1 4
Lerch, Wilfried Dornstadt, DE 20 159
Obst, Reinhold Amstetten, DE 1 4
Reichart, Johann Georg Blaubeuren, DE 3 8

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