Reactive-species supply device and surface treatment apparatus

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United States of America Patent

PATENT NO 9713241
SERIAL NO

13807249

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Abstract

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A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.

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Patent Owner(s)

Patent OwnerAddress
FUJI CORPORATIONCHIRYU-SHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hori, Masaru Nagoya, JP 67 1050
Isozumi, Joji Nagakute, JP 11 12
Kano, Hiroyuki Miyoshi, JP 78 737
Kawajiri, Akihiro Chiryu, JP 10 0
Kawasumi, Tetsunori Nagoya, JP 3 22
Watanabe, Toshimitsu Chiryu, JP 72 505
Yoshida, Naofumi Obu, JP 50 179

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