Method and apparatus for measuring scattering intensity distribution

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United States of America Patent

PATENT NO 9714907
APP PUB NO 20160069825A1
SERIAL NO

14651813

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Abstract

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It is an object of the present invention to provide a method and an apparatus for measuring a scattering intensity distribution capable of measuring a scattering intensity distribution in a reciprocal space in a short time. The method or apparatus for measuring a scattering intensity distribution causes X-rays emitted from an X-ray source (101) to be reflected by an X-ray optical element (102) so as to converge in the vicinity of a surface of a sample (SA), causes monochromatic X-rays condensed after passing through a plurality of optical paths to be incident on the sample at glancing angles (ω) that differ depending on the respective optical paths at a time in a state in which there is a correlation between an angle formed by each optical path of the monochromatic X-rays and a reference plane, and an angle formed by each optical path and a plane including the normal of the reference plane and an optical path located in the center of the respective optical paths, detects scattering intensities of the monochromatic X-rays scattered by the sample using a two-dimensional detector (103) and calculates a scattering intensity distribution in the reciprocal space based on the scattering intensity distribution detected by the two-dimensional detector and the correlation.

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Patent Owner(s)

Patent OwnerAddress
INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION1-1 OHO TSUKUBA-SHI IBARAKI 305-0801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arakawa, Etsuo Tokyo, JP 2 4
Matsushita, Tadashi Ibaraki, JP 41 283
Shirasawa, Tetsuro Chiba, JP 1 4
Takahashi, Toshio Tokyo, JP 256 3012
Voegeli, Wolfgang Ibaraki, JP 1 4

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