Spray unit and apparatus for cleaning substrate having spray unit
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United States of America Patent
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Aug 1, 2017
Issued Date -
N/A
app pub date -
Sep 10, 2015
filing date -
Jan 15, 2015
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A spray unit, including a body assembly including a solution supply port, the solution port to supply cleaning solution; a flow channel in the body assembly, the flow channel connected with the solution supply port, the cleaning solution to flow through the flow channel; and a spray slit connected to the flow channel, the spray slit to spray out the cleaning solution, the flow channel including at least two chambers to hold the cleaning solution and at least two internal slits connecting the chambers to each other.
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Cited Art Landscape
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