Method of fabricating a nanochannel system for DNA sequencing and nanoparticle characterization

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United States of America Patent

PATENT NO 9718668
SERIAL NO

13951664

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A process for fabricating a nanochannel system using a combination of microelectromechanical system (MEMS) microfabrication techniques, atomic force microscopy (AFM) nanolithography, and focused ion beam (FIB). The nanochannel system, fabricated on either a glass or silicon substrate, has channel heights and widths on the order of single to tens of nanometers. The channel length is in the micrometer range. The nanochannel system is equipped with embedded micro and nanoscale electrodes, positioned along the length of the nanochannel for electron tunneling based characterization of nanoscale particles in the channel. Anodic bonding is used to cap off the nanochannel with a cover chip.

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  • BOARD OF TRUSTEES OF THE UNIVERSITY OF ARKANSAS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Busch, Taylor Richardson, US 2 4
Kim, Jin-Woo Fayetteville, US 144 1199
Tung, Chao-Hung Steve Fayetteville, US 2 3

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