Method and device for characterizing an electron beam

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United States of America Patent

PATENT NO 9721755
SERIAL NO

14973230

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Abstract

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A device for detecting X-rays radiated out of a substrate surface, said device comprising at least one X-ray detector, a resolver grating and a modulator grating, said resolver grating with at least one opening facing towards said X-ray detector is arranged in front of said X-ray detector. Said modulator grating is provided between said resolver grating and said substrate at a predetermined distance from said resolver grating and said substrate, where said modulator grating having a plurality of openings in at least a first direction, wherein said x-rays from said surface is spatially modulated with said modulator grating and resolver grating.

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Patent Owner(s)

  • ARCAM AB

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lock, Tomas Vaestra Froelunda, SE 20 749

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