Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including tip-to-tip short configured fill cells, and the second DOE including corner short configured fill cells

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United States of America Patent

PATENT NO 9721938
SERIAL NO

15473646

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Abstract

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An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of tip-to-tip shorts, and the second DOE contains fill cells configured to enable NC detection of corner shorts.

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Patent Owner(s)

Patent OwnerAddress
PDF SOLUTIONS INC2858 DE LA CRUZ BLVD SANTA CLARA CA 95050

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brozek, Tomasz Morgan Hill, US 87 285
Cheng, Jeremy San Jose, US 117 290
Ciplickas, Dennis San Jose, US 88 366
Comensoli, Simone Darfo Boario Terme, IT 80 96
De, Indranil Mountain View, US 118 981
Doong, Kelvin Hsinchu, TW 81 177
Eisenmann, Hans Tutzing, DE 85 143
Fiscus, Timothy New Galilee, US 81 105
Haigh, Jonathan Pittsburgh, US 98 217
Hess, Christopher Belmont, US 123 1303
Kibarian, John Los Altos Hills, US 89 528
Lam, Stephen Freemont, US 123 1959
Lee, Sherry Monte Sereno, US 88 368
Liao, Marci Santa Clara, US 80 96
Lin, Sheng-Che Hsinchu, TW 86 96
Matsuhashi, Hideki Santa Clara, US 84 133
Michaels, Kimon Monte Sereno, US 88 271
O'Sullivan, Conor Campbell, US 93 243
Rauscher, Markus Munich, DE 89 820
Rovner, Vyacheslav Pittsburgh, US 80 96
Strojwas, Andrzej Pittsburgh, US 81 114
Strojwas, Marcin Pittsburgh, US 80 96
Taylor, Carl Pittsburgh, US 90 1035
Vallishayee, Rakesh Dublin, US 83 345
Weiland, Larg Hollister, US 81 96
Yokoyama, Nobuharu Tokyo, JP 80 96

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