Spectral purity filter

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United States of America Patent

PATENT NO 9726989
APP PUB NO 20130038926A1
SERIAL NO

13643265

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from a material having a bulk reflectance of substantially greater than or equal to 70% at the first wavelength of radiation. The material has a melting point above 1000° C.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Banine, Vadim Yevgenyevich Deurne, NL 222 2860
Jak, Martin Jacobus Johan Eindhoven, NL 74 524
Loopstra, Erik Roelof Eindhoven, NL 325 13253
Soer, Wouter Anthon Nijmegen, NL 59 251
Yakunin, Andrei Mikhailovich Eindhoven, NL 46 328

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