Patterning device, method of producing a marker on a substrate and device manufacturing method

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United States of America Patent

PATENT NO 9726991
SERIAL NO

14764522

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Abstract

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A patterning device, for use in forming a marker on a substrate by optical projection, the patterning device including a marker pattern having a density profile that is periodic with a fundamental spatial frequency corresponding to a desired periodicity of the marker to be formed. The density profile is modulated (such as sinusoidally) so as to suppress one or more harmonics of the fundamental frequency, relative to a simple binary profile having the fundamental frequency.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN 5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baselmans, Johannes Jacobus Matheus Oirschot, NL 163 4062
Bijnen, Franciscus Godefridus Casper Valkenswaard, NL 47 355
Palmen, Daniëlle Elisabeth Maria Eindhoven, NL 1 1

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