Method and system for a meta-recipe control software architecture

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United States of America Patent

PATENT NO 9727045
SERIAL NO

14136011

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Abstract

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A method and system for computerized coordination of multiple operations to be performed by components of machines are provided. The computer system includes a memory device for storing data and a computer-controlled machine that includes a processor in communication with the memory device wherein the processor is programmed to read a recipe file from the memory device, the recipe file including operating parameter values for controlling the operation of the machine, extract a name of a meta-recipe file from the recipe file, the meta-recipe file including a first portion including parameter properties of operating parameter values used by the meta-recipe file, receive values for the meta-recipe having the parameter properties specified in the first portion, and operate the machine using code from a second portion of the meta-recipe and the received values.

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Patent Owner(s)

Patent OwnerAddress
GLOBALWAFERS CO LTDHSINCHU

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Orschel, Benno Saint Louis, US 18 47
Wolfram, Mike Dachwig, DE 4 2

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