Substrate processing apparatus, storage device, and method of transporting substrate storing container
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United States of America Patent
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Aug 8, 2017
Grant Date -
Nov 20, 2014
app pub date -
Aug 6, 2014
filing date -
Mar 10, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.
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