Polymer anchored microelectromechanical system (MEMS) cantilever and method of fabricating the same

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United States of America Patent

PATENT NO 9731957
SERIAL NO

14601919

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Abstract

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A microelectromechanical system (MEMS) cantilever includes a base and a cantilever beam projecting from the base. The cantilever beam includes a piezo layer sandwiched between an inorganic material structural layer and an inorganic material encapsulating and immobilizing layer. A pair of electrical contacts are formed in the encapsulating and immobilizing layer in contact with the piezo layer. The base consists of polymer. A method includes depositing a sacrificial layer on a substrate; forming a MEMS cantilever beam on the sacrificial layer by depositing an inorganic material structural layer thereon; depositing a piezo layer on the structural layer; and depositing an inorganic material encapsulating and immobilizing layer on the piezo layer; forming a pair of electrical contacts in the encapsulating and immobilizing layer in contact with the piezo layer; forming a polymer base for the cantilever beam; and etching the sacrificial layer to release the MEMS cantilever beam from the substrate.

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Patent Owner(s)

Patent OwnerAddress
INDIAN INSTITUTE OF TECHNOLOGY BOMBAYMUMBAI 400 076 MAHARASHTRA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ramchandra, Apte Prakash Maharashtra, IN 1 5
Ramgopal, Rao Valipe Maharashtra, IN 1 5
Sachin, Patkar Rajul Maharashtra, IN 1 5

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