Micromechanical component with a reduced contact surface and its fabrication method

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United States of America Patent

PATENT NO 9731964
APP PUB NO 20160376147A1
SERIAL NO

15171002

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Abstract

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The invention relates to a silicon-based component with at least one reduced contact surface which, formed from a method combining at least one oblique side wall etching step with a “Bosch” etch of vertical side walls, improves, in particular, the tribology of components formed by micromachining a silicon-based wafer.

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Patent Owner(s)

  • NIVAROX-FAR S.A.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gandelhman, Alex Neuchatel, CH 15 21
Pin, Andre Le Landeron, CH 1 5

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