Importance

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Abstract

The present invention provides a drying method to dry a to-be-dried object by allowing the to-be-dried object to contact with gas having a different temperature. The method includes comprising: an introduction process of introducing the to-be-dried object; a first heating/cooling process of heating or cooling the to-be-dried object to have a first temperature; a transportation process of transporting the heated or cooled to-be-dried object; a humidity comparison process of comparing the to-be-dried object humidity of the to-be-dried object with the gas humidity of gas used for dehumidification; an atmosphere temperature adjustment process of adjusting, when the to-be-dried object humidity is high, the temperature of the gas used for dehumidification to a second temperature lower than the first temperature and adjusting, when the gas humidity is high, the temperature of the gas used for dehumidification to the second temperature higher than the first temperature; a dehumidification process of allowing the to-be-dried object to contact with the gas of the second temperature to thereby dehumidify the to-be-dried object; and a removal process of removing the to-be-dried object.

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First Claim