Vertical membranes for pressure sensing applications

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United States of America Patent

PATENT NO 9733139
SERIAL NO

14269052

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Abstract

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Pressure sensors having vertical diaphragms or membranes. A vertical diaphragm may be located in a first silicon wafer between a first and second cavity, where the first and second cavities are covered by a second silicon wafer. One or more active or passive devices or components may be located on a top of the vertical diaphragm.

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Patent Owner(s)

Patent OwnerAddress
MEASUREMENT SPECIALTIES INC1000 LUCAS WAY HAMPTON VA 23666

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doering, Holger Sunnyvale, US 8 34

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