System and method for characterizing focused charged beams

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United States of America Patent

PATENT NO 9733366
SERIAL NO

14397478

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Abstract

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An apparatus for characterizing a focused charged beam is provided. The apparatus includes a plurality of parallel conducting channels and at least one current sensing unit configured to measure current across each of the plurality of parallel conducting channels.

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Patent Owner(s)

  • INDIAN INSTITUTE OF TECHNOLOGY KANPUR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhattacharjee, Sudeep Kanpur, IN 2 5
Paul, Samit West Bengal, IN 5 37

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