Beam current density distribution adjustment device and ion implanter

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United States of America Patent

PATENT NO 9734982
SERIAL NO

15162929

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Abstract

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A beam current density distribution adjustment device is provided. The device includes member pairs in a long side direction of a ribbon beam, the member pairs adjusting a beam current density distribution in the long side direction of the ribbon beam by using an electric field or a magnetic field, members of each of the member pairs being disposed with the ribbon beam in-between the members. Opposing surfaces of the member pairs adjacent to each other in the long side direction of the ribbon beam are partially not parallel to a traveling direction of the ribbon beam.

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Patent Owner(s)

  • NISSIN ION EQUIPMENT CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hahto, Sami K Nashua, US 22 308
Yamamoto, Tetsuro Billerica, US 256 3238

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