Patterning methods and products

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United States of America Patent

PATENT NO 9738062
SERIAL NO

13555931

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Abstract

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The present invention provides a process for producing a surface-modified layer system comprising a substrate (2) and a self-assembled monolayer (SAM) (1) anchored to its surface. The SAM (1) is comprised by aryl or rigid alicyclic moiety species. The process comprises providing a polymorphic SAM (1) anchored to the substrate (2), and thermally treating (4) the SAM to change from a first to a second structural form thereof. The invention also provides a thermolithographic form of process in which the thermal treatment (4) is used to transfer a pattern (3) to the SAM (1), which is then developed.

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Patent Owner(s)

  • UNIVERSITY COURT OF THE UNIVERSITY OF ST ANDREWS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Buck, Manfred Strathkinness, GB 18 328
Cyganik, Piotr Liszki, PL 2 1

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