Micromechanical component having a diaphragm structure
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United States of America Patent
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Aug 22, 2017
Grant Date -
Dec 31, 2015
app pub date -
Jan 3, 2014
filing date -
Feb 5, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A diaphragm structure of a micromechanical component includes: a diaphragm integrated via at least one spring element into a layered structure, the diaphragm spanning a cavern, so that at least one section of the diaphragm edge extends up to and beyond the edge area of the cavern; and an anchoring structure formed in the overlap area between the diaphragm and the cavern edge area. The anchoring structure includes at least one anchor element structured out of the layered structure above the cavern edge area, and one through opening for the anchor element formed in the edge area of the diaphragm, so that there is a clearance between the anchor element and the through opening which allows for a mechanical stress relaxation of the diaphragm.
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