Systems and methods for pressure differential molecular spectroscopy of compressible fluids

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United States of America Patent

PATENT NO 9739708
SERIAL NO

15290684

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Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.

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Patent Owner(s)

  • MKS INSTRUMENTS, INC.;PASON SYSTEMS CORP.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Saptari, Vidi A Lexington, US 8 148

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