Etchant and method of manufacturing display device by using the same
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United States of America Patent
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Aug 22, 2017
Issued Date -
Oct 29, 2015
app pub date -
Oct 7, 2014
filing date -
Apr 28, 2014
priority date (Note) -
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Abstract
An etchant composition is provided comprising a persulfate from 0.5 to 20 wt %; a fluoride compound from 0.01 to 2 wt %; an inorganic acid from 1 to 10 wt %; a N (nitrogen atom)-containing heterocyclic compound from 0.5 to 5 wt %; a chloride compound from 0.1 to 5 wt %; a copper salt from 0.05 to 3 wt %; an organic acid or an organic acid salt from 0.1 to 10 wt %; an electron-donating compound from at 0.1 to 5 wt %; and a solvent of the residual amount. Also provided is a method of manufacturing a display device by using the same.
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