Container cleaning device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9744539
APP PUB NO 20150360266A1
SERIAL NO

14727954

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A container cleaning device includes a mounting plate shaped for accommodating a wafer; and a nozzle assembly disposed on the mounting plate and including a base and a shell complimentarily disposed on the base. The shell includes an inlet and at least one outlet member disposed on an edge. The base includes a recess communicating with the inlet, and at least one outlet element each being inclined at a predetermined angle with respect to the shell. Each outlet member of the shell is adjacent to and communicates with the corresponding outlet element of the base.

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First Claim

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Family

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Patent Owner(s)

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International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lai, Chun-Liang Zhubei, TW 20 53

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