Coating apparatus and nozzle
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United States of America Patent
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Aug 29, 2017
Grant Date -
Jan 2, 2014
app pub date -
Jun 18, 2013
filing date -
Jun 27, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
Disclosed is a coating apparatus capable of enhancing the film thickness uniformity. The coating apparatus includes a nozzle and a moving mechanism. The nozzle includes a storage chamber that stores a coating liquid and a slit-like flow path that is in communication with the storage chamber, and discharges the coating liquid through a discharge port formed at a front end of the flow path. The moving mechanism moves the nozzle and the substrate relatively to each other along a surface of the substrate. Also, in the flow path provided in the nozzle, flow resistance at the central portion in the longitudinal direction is larger than that at both end portions in the longitudinal direction.
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