Gas distributor, and method of forming the same
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United States of America Patent
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Aug 29, 2017
Grant Date -
N/A
app pub date -
Nov 2, 2016
filing date -
Sep 23, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Disclosed is a gas distributor, including: a nozzle unit formed by joining a pair of nozzle members together such that the nozzle members face each other with a first nozzle gap defined between the nozzle members; and a nozzle assembly in which at least two nozzle units are assembled together in parallel, in which the nozzle gap includes a first flow path formed in parallel in a direction of the nozzle member, and a second flow path extended from the first flow path, formed with a smaller width than a width of the first flow path along a bonded surface, and discharging gas through an end portion of one side of the second flow path, and the second flow path is extended with the first flow path, and is inclinedly provided so that a width is gradually decreased in a portion adjacent to the first flow path.
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