Multilayer microfluidic probe head with immersion channels and fabrication thereof
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United States of America Patent
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Aug 29, 2017
Grant Date -
Dec 19, 2013
app pub date -
Oct 18, 2011
filing date -
Oct 29, 2010
priority date (Note) -
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Abstract
The invention is directed to a microfluidic probe head (100) with a base layer (120) comprising: at least two processing liquid microchannel (123, 124) in fluid communication with a processing liquid aperture (121, 122) on a face of the base layer; and an immersion liquid microchannel (223, 224) in fluid communication with a immersion liquid aperture (221, 222) on a face of the base layer, wherein the microfluidic probe head is configured to allow, in operation, processing liquid provided through the processing liquid aperture to merge into immersion liquid provided through the immersion liquid aperture. An additional layer can be provided to close the microchannels. Such a multilayered head is compact and easier to fabricate than heads made with unitary construction. The head can further be interfaced with tubing using e.g. a standard fitting for tubing port.
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