Film forming apparatus and film forming method

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United States of America Patent

PATENT NO 9752249
APP PUB NO 20160265126A1
SERIAL NO

15062293

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Abstract

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A film forming apparatus includes: an anode; a solid electrolyte membrane that is arranged between the anode and an substrate that serves as a cathode, and that contains metal ions; a power supply that applies a voltage between the anode and the substrate in a state in which the solid electrolyte membrane is in contact with the substrate from above; and an oscillating portion configured to oscillate at least the anode in the state in which the solid electrolyte membrane is in contact with the substrate.

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Patent Owner(s)

Patent OwnerAddress
TOYOTA JIDOSHA KABUSHIKI KAISHATOYOTA-SHI AICHI-KEN 471-8571

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hiraoka, Motoki Toyota, JP 39 147
Sato, Yuki Nissin, JP 214 716
Yanagimoto, Hiroshi Miyoshi, JP 42 152

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