High density nano-array for sensing

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United States of America Patent

PATENT NO 9753006
SERIAL NO

14743637

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Abstract

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A sensor includes a semiconductor substrate having first pointed nodes extending into a channel from a first side of the channel. Second pointed nodes extend into the channel from a second side of the channel, which is opposite the first side. The second pointed nodes being self-aligned to the first pointed nodes on the opposite side of the channel. The first pointed nodes and the second pointed nodes are connected to a circuit to detect particles in the channel.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cao, Qing Yorktown Heights, US 150 561
Cheng, Kangguo Schenectady, US 3073 29791
Li, Zhengwen Scarsdale, US 126 1297
Liu, Fei Yorktown Heights, US 388 2253
Zhang, Zhen Ossining, US 434 3876

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