Edge bead removal apparatus

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United States of America Patent

PATENT NO 9753371
APP PUB NO 20170082924A1
SERIAL NO

15369075

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An edge bead removal apparatus is provided. The edge bead removal apparatus includes a clamping unit configured to clamp a cylindrical reticle and cause the cylindrical reticle to incline with a pre-determined angle and to rotate around a central axis. The edge bead removal apparatus also includes an edge bead removal solvent nozzle configured to spray an edge bead removal solvent to remove edge beads on both edges of the cylindrical reticle.

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First Claim

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Patent Owner(s)

  • SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Yang Shanghai, CN 1680 6507
Wu, Qiang Shanghai, CN 481 3503

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