Organoaminosilanes and methods for making same

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United States of America Patent

PATENT NO 9758534
SERIAL NO

14956748

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Abstract

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Organoaminosilanes, such as without limitation di-iso-propylaminosilane (DIPAS), are precursors for the deposition of silicon containing films such as silicon-oxide and silicon-nitride films. Described herein are methods to make organoaminosilane compounds, or other compounds such as organoaminodisilanes and organoaminocarbosilanes, via the catalytic hydrosilylation of an imine by a silicon source comprising a hydridosilane.

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Patent Owner(s)

  • VERSUM MATERIALS US, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ho, Richard Anaheim, US 26 1475
Lei, Xinjian Vista, US 192 10927
MacDonald, Matthew R Laguna Niguel, US 39 1043
Xiao, Manchao San Diego, US 134 11347

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