Sputtering apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Sep 12, 2017
Grant Date -
Mar 6, 2014
app pub date -
Sep 3, 2013
filing date -
Sep 4, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
One embodiment is directed to a magnetron assembly comprising a plurality of magnets, and a yoke configured to hold the plurality of magnets in at least four straight, parallel, independent linear arrays. The plurality of magnets is arranged in the yoke so as to form a pattern comprising an outer portion and an inner portion, wherein the outer portion substantially surrounds the perimeter of the inner portion. The end portions of the linear array comprise a pair of turnaround sections, wherein each turnaround section substantially spans respective ends of the pair of elongated sections of the outer portion. The magnets in each turnaround section are arranged to form at least two or more different curves in the magnetic field that are offset from each along the target rotation axis.
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