Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unit
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United States of America Patent
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Sep 12, 2017
Issued Date -
N/A
app pub date -
Aug 24, 2012
filing date -
Sep 26, 2011
priority date (Note) -
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Abstract
Provided are a substrate supporting unit and a substrate processing apparatus, and a method of manufacturing the substrate supporting unit. The substrate supporting unit includes a susceptor on which a substrate is placed on a top surface thereof, one or more heat absorbing members which are capable of being converted between a mounted position at which the heat absorbing member is disposed on an upper portion of the susceptor to thermally contact the susceptor and a released position at which the heat absorbing member is separated from the upper portion of the susceptor, the one or more heat absorbing members absorbing heat of the susceptor at the mounted position, and an edge ring having a plurality of fixing slots in which the heat absorbing members are selectively inserted and fixed.
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