Laser apparatus and extreme ultraviolet light generation system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9762024
APP PUB NO 20160156150A1
SERIAL NO

15016961

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An example of the disclosure is a laser apparatus including a master oscillator capable of outputting a pulse laser beam, a plurality of optical amplifiers disposed on an optical path of the pulse laser beam outputted from the master oscillator and configured to sequentially amplify the pulse laser beam, an optical reflector capable of passing the pulse laser beam therethrough and reflecting a self-oscillation beam generated in one of the plurality of optical amplifiers, and an optical absorber capable of receiving and absorbing the self-oscillation beam reflected by the optical reflector.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INC400 OAZA YOKOKURASHINDEN OYAMA-SHI TOCHIGI 323-8558

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawasuji, Yasufumi Oyama, JP 27 71
Kurosawa, Yoshiaki Oyama, JP 40 749

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