Device for forming separation starting point, stack manufacturing apparatus, and method for forming separation starting point

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United States of America Patent

PATENT NO 9764488
SERIAL NO

14468801

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Importance

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Abstract

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A device for forming a separation starting point that allows separation of a surface layer of a processed member to form a remaining portion is provided. A manufacturing device of a stack including a support and a remaining portion of a processed member whose surface layer is separated is provided. The device for forming the separation starting point includes a stage that supports the processed member, a cutter that faces the stage, a head portion that supports the cutter, an arm portion that supports the head portion, and a moving mechanism that relatively moves the cutter to the stage.

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Patent Owner(s)

  • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adachi, Hiroki Tochigi, JP 181 4451
Eguchi, Shingo Atsugi, JP 168 2794
Hirakata, Yoshiharu Ebina, JP 491 10364
Idojiri, Satoru Tochigi, JP 52 594
Ikeda, Hisao Zama, JP 288 4533
Jinbo, Yasuhiro Isehara, JP 163 2523
Komatsu, Ryu Isehara, JP 32 679
Nakamura, Daiki Atsugi, JP 99 623
Ohno, Masakatsu Utsunomiya, JP 50 615
Yokoyama, Kohei Fujisawa, JP 87 1135

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