Corrosion and erosion-resistant mixed oxide coatings for the protection of chemical and plasma process chamber components
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United States of America Patent
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Sep 19, 2017
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Apr 29, 2014
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Apr 29, 2013
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Abstract
There is disclosed a method for producing corrosion and erosion-resistant mixed oxide coatings on a metal substrate, as well as a mixed oxide coating itself. A surface of the substrate metal is oxidized and converted into a first coating compound comprising a primary oxide of that metal by a plasma electrolytic oxidation (PEO) process. One or more secondary oxide compounds comprising oxides of secondary elements not present in conventional alloys of the substrate metals at significant (>2 wt %) levels are added to the first oxide coating. The source of the secondary element(s) is at least one of: i) a soluble salt of the secondary element(s) in the electrolyte; ii) an enrichment of the surface of the substrate metal with secondary element(s) prior to PEO processing; and iii) a suspension of the secondary element(s) or oxide(s) of the secondary element(s) applied to the oxide of the metal after this has been formed by the PEO process.
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