Apparatus, system and method of detecting leakage in a chamber
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United States of America Patent
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Sep 19, 2017
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app pub date -
Jun 9, 2014
filing date -
Jun 9, 2014
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Abstract
Some demonstrative embodiments include apparatuses, devices and/or methods of detecting leakage in a chamber. For example, an apparatus may include a leakage detector to detect leakage in a chamber based on at least one set of power values corresponding to at least one respective heating zone of the chamber, the set of power values including a plurality of power values corresponding to a respective plurality of manufacturing processes performed by the chamber, wherein a power value of a manufacturing process is based on a plurality of power control values to control the heating zone during the manufacturing process.
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