Patterning device support, lithographic apparatus, and method of controlling patterning device temperature

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United States of America Patent

PATENT NO 9766557
SERIAL NO

15438376

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Abstract

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A patterning device support for controlling a temperature of a patterning device can include a movable component. The movable component can include a gas inlet for supplying a gas flow across a surface of the patterning device and a gas outlet for extracting the gas flow. The patterning device support can also include a gas flow generator coupled to a duct, for recirculating the gas flow from the gas outlet to the gas inlet.

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Patent Owner(s)

  • ASML HOLDING N.V.;ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alikhan, Abdullah Wilton, US 11 164
Burbank, Daniel Nathan Wilton, US 13 55
Delmastro, Peter A New Milfort, US 10 60
Ebert, Earl William Oxford, US 7 14
Galburt, Daniel Nicholas Wilton, US 5 35
Nayfeh, Samir A Shrewsbury, US 24 134
Onvlee, Johannes s-Hertogenbosch, NL 50 469
Schuster, Mark Josef Fairfield, US 11 56
Van, Boxtel Frank Johannes Jacobus Eindhoven, NL 33 113
Verdirame, Justin Matthew Cambridge, US 10 48
Ward, Christopher Charles Somerville, US 17 73

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