Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture

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United States of America Patent

PATENT NO 9770804
SERIAL NO

14218578

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Abstract

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A slurry and/or chemical blend supply apparatus suitable for providing slurry and/or chemical blend to chemical mechanical planarization (CMP) tools or other tools in a semiconductor fabrication facility, related processes, methods of use and methods of manufacture. The slurry and/or chemical blend supply apparatus includes one or more of the following: feed module, blend module, analytical module and distribution module.

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Patent Owner(s)

  • VERSUM MATERIALS US, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bayer, Benjamin Patrick Albuquerque, US 3 39
Byers, Gary Allen Sandia Park, US 2 32
Derecskei, Bela Fountain Hill, US 5 33

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