MEMS device, liquid ejecting head, and liquid ejecting apparatus

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United States of America Patent

PATENT NO 9770907
SERIAL NO

15354851

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Abstract

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A MEMS device includes a drive region having a stacked structural body in which a first electrode layer, a first dielectric layer, and a second electrode layer are stacked in that order. The stacked structural body extends from the drive region to a non-drive region that is outer than the drive region and, in an extending direction of the stacked structural body, the first electrode layer and the first dielectric layer extend farther outward than the second electrode layer. A second dielectric layer covering an end of the second electrode layer in the extending direction is stacked on the second electrode layer in the non-drive region and the first dielectric layer that is formed outer in the extending direction than the second electrode layer. A third electrode layer electrically connected to the second electrode layer is stacked on the second dielectric layer and on the second electrode layer in a region outside the second dielectric layer. In the extending direction, the end of the second electrode layer is formed more to a drive region side than a second dielectric layer-side end of the third electrode layer.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirai, Eiju Azumino, JP 141 569
Nakayama, Masao Shiojiri, JP 118 847
Saimen, Munehide Suwa, JP 28 71
Takabe, Motoki Shiojiri, JP 148 333
Tsukahara, Katsutomo Shiojiri, JP 35 222

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