Optical measuring device
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United States of America Patent
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Sep 26, 2017
Grant Date -
Mar 2, 2017
app pub date -
Jul 13, 2016
filing date -
Aug 26, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is an optical measuring device that can realize a wide measurement region without an increase in the measurement time or a reduction in the measurement region while avoiding damage to a measurement target due to excessive light exposure, using a simple configuration. The device includes a light source, an optical splitting unit configured to split a light beam emitted from the light source into a signal beam and a reference beam, an objective lens configured to focus the signal beam and irradiate a measurement target with the signal beam, a scanning unit configured to move the focus position of the signal beam, an optical element having lower transmissivity in its peripheral portion than in its central portion, interference optics configured to combine the reference beam with the signal beam reflected or scattered by the measurement target, thereby generating interference beams, and photodetectors configured to detect the respective interference beams.
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