MEMS capacitive pressure sensor

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United States of America Patent

PATENT NO 9772245
SERIAL NO

13786818

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Abstract

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A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.

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Patent Owner(s)

  • AMS INTERNATIONAL AG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Besling, Willem Frederik Adrianus Eindhoven, NL 46 591
Goossens, Martijn Veldhoven, NL 15 226
Steeneken, Peter Gerard Valkenswaard, NL 34 359
van, Beek Jozef Thomas Martinus Rosmalen, NL 46 849
Wunnicke, Olaf Eindhoven, NL 34 563

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