Ceramic member
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United States of America Patent
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Oct 3, 2017
Grant Date -
Jul 18, 2013
app pub date -
Sep 26, 2011
filing date -
Sep 29, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is a ceramic member in which the difference in thermal expansion coefficient between an insulating ceramic material and an electrically conductive ceramic material is extremely small and therefore any mismatch caused in association with this difference in thermal expansion coefficient does not occur, and which does not undergo any failure such as breakage, cracking, detachment or destruction. The ceramic member (1) includes an electrically conductive ceramic material (2) which contains yttrium oxide as the main component and additionally contains a fibrous electrically conductive substance such as carbon nanotubes in an amount of 0.1 to 3 vol % inclusive and an insulation ceramic material (3) which contains yttrium oxide as the main component, wherein the electrically conductive ceramic material (2) and the insulation ceramic material (3) are adhered to each other in an integrated manner through an adhesive layer (4) which includes an inorganic adhesive material.
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