Method and structure providing a front-end-of-line and a back-end-of-line coupled waveguides

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United States of America Patent

PATENT NO 9778416
APP PUB NO 20160054520A1
SERIAL NO

14467531

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Abstract

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An integrated structure and method of formation provide a lower level waveguide having a core of a first material and a higher level waveguide having a core of a second material and a coupling region for coupling the two waveguides together. The different core materials provided different coupled waveguides having different light loss characteristics.

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Patent Owner(s)

  • MASSACHUSETTS INSTITUTE OF TECHNOLOGY;MICRON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Meade, Roy Boise, US 55 288
Orcutt, Jason Katonah, US 11 35
Popovic, Milos Boulder, US 60 921
Shainline, Jeffrey Boulder, US 8 34
Sternberg, Zvi Metar, IL 8 56
Stojanovic, Vladimir Berkeley, US 67 343
Tehar-Zahav, Ofer Hadera, IL 12 407

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