Ultrasonic transducer device, probe, electronic instrument, and ultrasonic diagnostic device

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United States of America Patent

PATENT NO 9782150
SERIAL NO

15417875

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An ultrasonic transducer device includes a base, a first electrode film, a piezoelectric film, a second electrode film and a first conductive film. The base has a plurality of vibrating film portions arranged in an array pattern. The first electrode film is disposed on each of the vibrating film portions. The piezoelectric film is disposed on the first electrode film. The second electrode film is disposed on the piezoelectric film. The first conductive film is connected to the first electrode film. The first conductive film has a film thickness larger than a film thickness of the first electrode film.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kiyose, Kanechika Nagano, JP 101 426
Matsuda, Hiroshi Gifu, JP 454 5359
Suzuki, Hironori Nagano, JP 113 619

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